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Title: Towards CMOS/2D hybrid microchips
Abstract: Two-dimensional layered materials (2D-LMs) materials have outstanding physical, chemical and thermal properties that make them attractive for the fabrication of solid-state micro/nano-electronic devices and circuits. However, synthesizing high-quality 2D-LMs at the wafer scale is difficult, and integrating them in semiconductor production lines brings associated multiple challenges. Nevertheless, in the past few years substantial progress has been achieved and leading companies like TSMC, Samsung and IMEC have started to work more intensively on the fabrication of devices using 2D-LMs. In this keynote talk, I will discuss the state-of-the-art on micro/nano-electronic devices made (entirely or partially) of 2D-LMs, the most sophisticated circuits ever constructed, and the fabrication of CMOS/2D hybrid microchips. I will put special emphasis on devices that employ hexagonal boron nitride, the only 2D-LM with an enough high band gap to be employed as dielectric. I will also discuss the main technological challenges to face in the next years and provide some recommendations on how to solve them.
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Representative papers:
[1] Mario Lanza, Abu Sebastian, Wei D. Lu, Manuel Le Gallo, Meng-Fan Chang, Deji Akinwande, Francesco M. Puglisi, Husam N. Alshareef, Ming Liu, Juan B. Roldan. Memristive technologies for data storage, computation, encryption, and radio-frequency communication. Science, 2022, 376, eabj9979.
[2] Kaichen Zhu, Chao Wen, Areej A Aljarb, Fei Xue, Xiangming Xu, Vincent Tung, Xixiang Zhang, Husam N Alshareef, Mario Lanza. The development of integrated circuits based on two-dimensional materials. Nature Electronics. 2021, 4, 775–785.
[3] Shaochuan Chen, Mohammad Reza Mahmoodi, Yuanyuan Shi, Chandreswar Mahata, Bin Yuan, Xianhu Liang, Chao Wen, Fei Hui, Deji Akinwande, Dmitri B. Strukov, Mario Lanza. Wafer-scale integration of two-dimensional materials in high-density memristive crossbar arrays for artificial neural networks. Nature Electronics. 2020, 3, 638–645.
[4] Fei Hui, Mario Lanza. Scanning probe microscopy for advanced nanoelectronics. Nature Electronics. 2019, 2, 221-229.
[5] Yuanyuan Shi, Xianhu Liang, Bin Yuan, Victoria Chen, Haitong Li, Fei Hui, Zhouchangwan Yu, Fang Yuan, Eric Pop, H.-S. Philip Wong, Mario Lanza. Electronic synapses made of layered two-dimensional materials. Nature Electronics. 2018, 1, 458–465. |
